微系统和纳米技术(英文)

3.1 Failure Mechanisms of Materials Used in Microsystems
3.2 Methods for Measuring Mechanical Properties of
3.3 Structure Materials for Microsystems
3.4 Materials for Microtribological Application
References
4 Nanopiezotronics and Nanogenerators
4.1 Piezotronic Property of ZnO Nanowires
4.2 Piezotronics Nanodevices from ZnO Nanowires
4.3 ZnO Nanowire Nanogenerators
4.4 Outlook
Acknowledgements
References
Electron Transport in Single Molecules and Nanostructures
5.1 Electron Transport in Nanoscale Junctions
5.2 Conductance Measurement
5.3 Single Barrier Tunnel Junction and Resonant Tunneling
5.4 Double Barrier Tunnel Junction and Single Electron Phenomena
5.5 RectifyingEffect in Single Molecules
5.6 NDR Effect
5.7 Kondo Effect
5.8 Inelastic Electron Tunneling Spectroscopy (IETS)
Acknowledgements
References
Microsystem
6 Introduction to MEMS.
6.1 What is MEMS
6.2 MEMS Technology
6.3 A Brief History of MEMS
6.4 Future of MEMS
6.5 Conclusions.
Acknowledgements
References
7 Microelectromechanical Sensors
7.1 Introduction
7.2 Resonant Mechanical Sensors
7.3 Silicon Based Electrostatic Field Sensors
7.4 MEMS Based Microgas Sensor
7.5 Waveguide-Based Nanoporous Thin-Film Sensors for Chemical, Biological and Gas Detection
7.6 Electrochemical Reaction Based Biochemical Sensors
References
8 MEMS Design
8.1 Introduction
8.2 MEMS Design Tools
8.3 Bulk-Micromachining Based MEMS Design
8.4 Surface-Micromachining Based MEMS Design
8.5 Future Trends and Summary
References
9 MEMS Processing and Fabrication Techniques and Technology---Silicon-Based Micromachining
9.1 Surface Micromachining Technology
9.2 Bulk Micromachining
References
10 Optical MEMS and Nanophotonics
10.1 Actuation Mechanisms
10.2 Applications
10.3 Conclusion
References
11 Introduction to MEMS Packaging
11.1 Introduction
11.2 MEMS Packaging Fundamentals
11.3 Contemporary MEMS Packaging Approaches
11.4 Bonding Processes for MEMS Packaging Applications
11.5 Hermetic/Vacuum Packaging and Applications
11.6 Packaging Reliability and Accelerated Testing
11.7 Future Trends and Summary
References
Nanotechnology
12 Advancement of Laser-Assisted and Roller-Based Nanoimprinting Technology
12.1 Introduction
12.2 Fundamental Mechanism of Laser-Assisted Direct Imprinting (LADI)
12.3 Roller-Based Laser-Assisted Direct Imprinting
12.4 Laser-Assisted Direct Metal Film Patterning (LAMP)
12.5 Contact Transfer and Mask Embedded Lithography (CMEL)
12.6 Conclusions and Future Perspectives
Acknowledgements
References
13 The Application of STM and AFM in Nanoprocess and Fabrication
13.1 Introduction
13.2 The Manipulation and Processing of Single Atoms and Molecules
13.3 Nanolithography on Surfaces
13.4 Nanoscale Surface Processing Based on Electrochemical Reactions
13.5 Metal Nanostructures Fabricated with Field Evaporation
13.6 Dip-pen Nanolithography
13.7 Nanografting
13.8 Nanoprocess with Heatable AFM Tips
13.9 Summary and Perspective
References
14 Nanoscale Fabrication
14.1 Introduction
14.2 Electron Beam Lithography (EBL)
14.3 Ion Beam Lithography (IBL)
14.4 Nanoimprint Lithography (NIL)
14.5 Scanning Tunneling Microscopic Lithography (STML)
14.6 Atomic Force Microscopic Lithography (AFML)
14.7 Dip-Pen Nanolithography (DPN)
14.8 Self-Assembly/Bottom-Up Approach
14.9 Concluding Remarks
Acknowledgements
References
15 Integrated Nanotechnology Based on MEMS
15.1 Introduction
15.2 Technical Trend from MEMS to NEMS.
15.3 Integrated Nanomachining Technologies
15.4 Nanoelectromechanical Size-Effect
15.5 Typical MEMS-Made NEMS Devices
15.6 Prospect of NEMS Technology
References
Application Issues
16 Applications of Microelectro-Mechanical Systems
16.1 Brief History and Trends of Microelectro-Mechanical System
16.2 Application of MEMS
16.3 An Important Opening Application Field-Bio-Medical Applications
16.4 Applications of Implantable MEMS--Physical Therapy, Medical Care and Drug Developments
References
17 Microelectromechanical Sensor-Based System
17.1 Introduction
17.2 Coordinate Transformation and Attitude Measurement in 3D Space
17.3 Attitude Estimation Algorithm of Multi-Sensor System
17.4 Assembly Orthogonal Error Compensation Technology for Sensing System
17.5 Microelectromechanical Sensor-Based Application Systems
17.6 Concluding Remarks
Acknowledgements
References
18 A Surface Micromachined Accelerometer with Integrated CMOS Detection Circuitry
18.1 Introduction
18.2 Background--Literature
18.3 Experimental Design: Accelerometer Design
18.4 Fabrication Technology
18.5 Experimental Results
18.6 Conclusions and Future Research
References
19 MEMS in Automobiles
19.1 Overview of Automotive MEMS
19.2 Essence of MEMS Technology.
19.3 Automotive MEMS
19.4 Concluding Remark
Acknowledgements
References
20 Biochip
20.1 Introduction
20.2 Historical Background and Present Condition.
20.3 Microarray Chip
20.4 Fabrication and Detection of Microarray Chip
20.5 Sample Pretreatment Microfluidic Chip
20.6 PCR Biochip
20.7 Capillary Electrophoresis Microfluidic Chip
20.8 Chromatography Chip
20.9 Microfluidic Hybridization and Immunoassay Biochips
20.10 Micro Total Analysis System
20.11 Technologies for Microfluidic Chip
20.12 Perspectives
References
21 Micro/Nano Technologies and Their Biological and Medical Applications
21.1 Introduction
21.2 Biological and Medical Applications
21.3 Conclusions and Future Prospective
Acknowledgements
References
22 Microfluidic Platforms for Lab-On-A-Chip Applications
22.1 Introduction: The Need for Microfiuidic Platforms
22.2 Capillary Driven Test Strips
22.3 Microfluidic Large-Scale Integration (LSI)
22.4 Centrifugal Microfluidics
22.5 Electrokinetic Platforms
22.6 Droplet-Based Microfluidic Platforms.
22.7 Free Scalable Non-Contact Dispensing
22.8 Conclusion
References
Development and Prospects
23 Development and Prospects
23.1 Microsystems Technologies: MEMS and NEMS
23.2 Some Considerations of MEMS in the Past and the Future
23.3 History, Experience and Vision on Micromachining and MEMS
23.4 Not Nearly Enough,Past Experience and Future Predictions for Emerging Micro-Nano Technologies
References
Index Color Figures